Maskentechnik für Mikroelektronikbausteine : Tagung München, 14. November 1985

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Bibliographic Information

Title
"Maskentechnik für Mikroelektronikbausteine : Tagung München, 14. November 1985"
Statement of Responsibility
VDI/VDE-Gesellschaft Feinwerktechnik
Publisher
  • VDI
Publication Year
  • c1985
Book size
23 cm

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Notes

Includes bibliographical references

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