Doping engineering for front-end processing : symposium held March 25-27, 2008, San Francisco, California, U.S.A.
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Bibliographic Information
- Title
- "Doping engineering for front-end processing : symposium held March 25-27, 2008, San Francisco, California, U.S.A."
- Statement of Responsibility
- editors, B.J. Pawlak ... [et al.]
- Publisher
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- Materials Research Society
- Publication Year
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- c2008
- Book size
- 24 cm
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Notes
"This volume contains papers presented at Symposium E, 'Doping engineering for front-end processing' held March 25-27 at the 2008 MRS Spring Meeting in San Francisco, California."--Pref.
Includes bibliographical references and indexes
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Details 詳細情報について
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- CRID
- 1130282272899946112
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- NII Book ID
- BA88653487
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- ISBN
- 9781605110400
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Warrendale, Pa.
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- Data Source
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- CiNii Books