ICO20 : MEMS, MOEMS, and NEMS : 21-26 August, 2005, Changchun, China

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Bibliographic Information

Title
"ICO20 : MEMS, MOEMS, and NEMS : 21-26 August, 2005, Changchun, China"
Statement of Responsibility
Masayoshi Esashi, Zhaoying Zhou, chairs/editors ; organized by ICO--International Commission for Optics ...[et al.] ; sponsored by AFOSR Asia Office ... [et al.] ; published by SPIE--the International Society for Optical Engineering
Publisher
  • SPIE
Publication Year
  • c2006
Book size
28 cm
Other Title
  • MEMS, MOEMS, and NEMS

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Notes

Includes bibliographical references and author index

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