Resists in microlithography and printing

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Bibliographic Information

Title
"Resists in microlithography and printing"
Statement of Responsibility
Bohumil Bednář, Jaroslav Králíček, and Jaromír Zachoval ; with contributions by Andrey V. Yelcov and Tatyana A. Yurre
Publisher
  • Elsevier
  • 2nd rev. ed
Publication Year
  • 1993
Book size
25 cm
Other Title
  • Litografické techniky
Uniform Title
  • Litografické techniky

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Notes

Translation of: Litografické techniky

Includes bibliographical references and index

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