Deposition and growth : limits for microelectronics, Anaheim, CA 1987

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Bibliographic Information

Title
"Deposition and growth : limits for microelectronics, Anaheim, CA 1987"
Statement of Responsibility
editor, G.W. Rubloff
Publisher
  • American Institute of Physics
Publication Year
  • 1988
Book size
25 cm

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Notes

DOE CONF-8711124

Includes bibliographies and index

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