Fabrication of Periodic Submicron Dot Structures of N-InP by Laser-Induced Surface Electromagnetic Wave Etching

DOI Web Site Web Site 参考文献15件

書誌事項

公開日
1992-07-01
権利情報
  • https://iopscience.iop.org/page/copyright
  • https://iopscience.iop.org/info/page/text-and-data-mining
DOI
  • 10.1143/jjap.31.l928
公開者
IOP Publishing

この論文をさがす

説明

<jats:p> Periodic submicron dot structures were fabricated by laser-induced surface electromagnetic wave etching of indium phosphide substrates. The shape of the dot was observed as a cone whose diameter at the half maximum was about 0.2 µm. Periods along two perpendicular axes were 0.38 µm and 0.57 µm, respectively. The periods were nearly in agreement with the calculation. </jats:p>

収録刊行物

参考文献 (15)*注記

もっと見る

詳細情報 詳細情報について

問題の指摘

ページトップへ