Measurements of the CF, CF<sub>2</sub> and CF<sub>3</sub> Radicals in a CHF<sub>3</sub> Electron Cyclotron Resonance Plasma
書誌事項
- 公開日
- 1993-05-01
- 権利情報
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- https://iopscience.iop.org/page/copyright
- https://iopscience.iop.org/info/page/text-and-data-mining
- DOI
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- 10.1143/jjap.32.l694
- 公開者
- IOP Publishing
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説明
<jats:p> The CF, CF<jats:sub>2</jats:sub> and CF<jats:sub>3</jats:sub> radicals were investigated in an on-off modulated electron cyclotron resonance (ECR) plasma employing a CHF<jats:sub>3</jats:sub> gas using infrared diode laser absorption spectroscopy (IRLAS). The microwave power dependences of the radical densities were measured at a CHF<jats:sub>3</jats:sub> pressure of 0.4 Pa in the microwave power range from 50 W to 800 W. Moreover, the extinction processes of the radicals were discussed on the basis of the decay curve analysis of the radical densities after termination of the discharge. </jats:p>
収録刊行物
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 32 (5A), L694-, 1993-05-01
IOP Publishing
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詳細情報 詳細情報について
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- CRID
- 1360003446842319232
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- NII論文ID
- 210000034943
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- ISSN
- 13474065
- 00214922
- https://id.crossref.org/issn/13474065
- https://id.crossref.org/issn/00214922
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