Alignment and Use of Self-Assembled Peptide Nanotubes as Dry-Etching Mask
Description
<jats:p>Self-assembled diphenylalanine peptide nanotubes provide a means of achieving nanostructured materials in a very simple and fast way. Recent discoveries have shown that this unique material, in addition to remaining stable under dry conditions, rapidly dissolves in water making it a promising candidate for controlled nanofabrication without organic solvents. The present work demonstrates how this unique structure can be aligned, manipulated and used as both an etching mask in a dry etching procedure and as a lift-off material. As a further demonstration of the potential of this technique, the peptide nanotubes were utilized to fabricate silicon nanowire devices and gold nanoslits in a rapid manner.</jats:p>
Journal
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 51 (6S), 06FF13-, 2012-06-01
IOP Publishing
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Details 詳細情報について
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- CRID
- 1360003446856996992
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- NII Article ID
- 210000072400
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- ISSN
- 13474065
- 00214922
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- Data Source
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- Crossref
- CiNii Articles