Design of an Electrostatics Lens of the Micro-Column Microscopes Using a Multi-Gated FEA
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- Akifumi Koike
- Shizuoka University
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- Yasuo Takagi
- Shizuoka University
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- Takahiro Fujino
- Shizuoka University
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- Toru Aoki
- Shizuoka University
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- Y. Neo
- Shizuoka University
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- Hidenori Mimura
- Shizuoka University
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- Tomoya Yoshida
- Shizuoka University
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- Masayoshi Nagao
- National Research Institute of Advanced Industrial Science and Technology (AIST)
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- Kentaro Sakai
- National Research Institute of Advanced Industrial Science and Technology (AIST)
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- Hidekazu Murata
- Meijo University
Abstract
<jats:p>A crossover point was observed with a fabricated quintuple-gated micro-column by an enhanced knife-edge measurement. Developing this result, we designed a new tiny electron beam microscope using multi-gated micro-column by using scale down rule of a micro-column. A beam spot size of the proposed device was estimated to be 50nm by an electron beam trajectories simulation. Exact techniques were developed and demonstrated for the fabrication of the proposed device.</jats:p>
Journal
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- Advanced Materials Research
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Advanced Materials Research 222 94-97, 2011-04
Trans Tech Publications, Ltd.
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Keywords
Details 詳細情報について
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- CRID
- 1360004239844418944
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- ISSN
- 16628985
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- Data Source
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- Crossref
- KAKEN