Rare‐Earth Plasma Beyond Extreme Ultraviolet (BEUV) Sources at 6.<i>x</i> nm

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<jats:title>SUMMARY</jats:title><jats:p>We have studied self‐absorption effects of a laser‐produced plasma (LPP) source at 6.<jats:italic>x</jats:italic> nm as a function of laser pulse duration and viewing angle. The spectral profiles are shown to have a strong dependence on the viewing angle. Absorption effects are less pronounced when a 150‐ps pulse duration is used due to reduced opacity resulting from plasma expansion. Conversion efficiencies and ion energies are also measured as a function of laser pulse duration and laser power density. A maximum conversion efficiency of 0.4% within a 0.6% bandwidth was measured, and lower ion kinetic energy was observed. It is concluded that in order to reduce self‐absorption effects and ion yields, and increase conversion efficiencies, a short pulse duration should be used.</jats:p>

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