High-sensitivity computer-controlled infrared polariscope

DOI PDF 被引用文献11件
  • Masayoshi Yamada
    Department of Electronics and Information Science, Kyoto Institute of Technology, Matsugasaki, Sakyoku, Kyoto 606, Japan

書誌事項

公開日
1993-07-01
DOI
  • 10.1063/1.1144016
公開者
AIP Publishing

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説明

<jats:p>A high-sensitivity computer-controlled infrared polariscope has been developed to measure a small amount of phase retardation, and the principal axes of birefringence induced by residual strains in commercial III-V compound wafers with standard dimensions. In order to check the performance of the polariscope, semi-insulating LEC-grown GaAs (100) wafers, currently used for high-speed integrated circuits, were examined. The residual strain components of ‖Sr−St‖, ‖Syy−Szz‖, and ‖Syz‖ were evaluated from the measured values of the phase retardation and the principal axes of birefringence. It was found that the polariscope developed here was highly sensitive enough to characterize the residual strain components to the order of 10−7 in thin commercial GaAs wafers.</jats:p>

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