The application and status of the radio frequency driven multi-cusp ion source (invited)

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  • Ka-Ngo Leung
    Lawrence Berkeley National Laboratory, University of California, Berkeley, California 94720

Abstract

<jats:p>The multi-cusp ion source has been operated with 2 and 13.5 MHz in either pulse or cw mode for positive or negative ion beam production. Application of this type of source includes spallation neutron source, ion implantation, ion beam lithography, focused ion beam systems, radioactive ion beam production, and neutron generators. In order to achieve long life and reliable operation, different antenna arrangements have been explored. It is found that several antenna configurations can provide over 100 h of rf induction discharge operations.</jats:p>

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