Isotope Effect of H<sup>–</sup>/D<sup>–</sup> Volume Production in Low‐Pressure H<sub>2</sub>/D<sub>2</sub> Plasmas – Measurement of VUV Emissions and Negative Ion Densities

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<jats:title>Abstract</jats:title><jats:p>Isotope effect on H<jats:sup>–</jats:sup>/D<jats:sup>–</jats:sup> volume production is studied by measuring both VUV emission and negative ion density in the source. In a double plasma type source, under some discharge conditions, extracted D<jats:sup>–</jats:sup> currents are nearly the same as H<jats:sup>–</jats:sup> currents, although VUV emission intensity (corresponding to production of vibrationally excited molecules) in D<jats:sub>2</jats:sub> plasmas is slightly lower than that in H<jats:sub>2</jats:sub> plasmas. Considering the factor √2 due to mass difference, D<jats:sup>–</jats:sup> ion density in the extraction region of the source is higher than H<jats:sup>–</jats:sup> ion density. In another experiment with a rectangular arc chamber, axial distributions of H<jats:sup>–</jats:sup>/D<jats:sup>–</jats:sup> ion densities in the source are measured directly using a laser photodetachment method. Relationship between H<jats:sup>–</jats:sup>/D<jats:sup>–</jats:sup> production and plasma parameter control with using a magnetic filter (MF) is discussed. Furthermore, relative intensities of extracted negative ion currents are discussed compared with the negative ion densities in the source. Production and control of D<jats:sub>2</jats:sub> plasmas are well realized with the MF including good combination between the filament position and field intensity of the MF. Extracted H<jats:sup>–</jats:sup> and D<jats:sup>–</jats:sup> currents depend directly on negative ion densities in the source. (© 2004 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)</jats:p>

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