Fabrication and optical characterization of a TiO2 thin film on a silica microsphere

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Abstract We have fabricated a uniform TiO 2 thin film on a silica microsphere by using the so-called sol–gel reaction. Characterization of the TiO 2 thin film was carried out by scanning electron microscopy, Raman scattering, and the attenuated-total-reflection (ATR) method. We have observed optical resonances of microspheres with and without the TiO 2 thin film by using the ATR method, which allowed us to evaluate optically the thickness and the refractive index of the TiO 2 thin film from the resonance due to excited whispering gallery modes, which are resonance modes inherent of microspheres.

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