Sensitivity improvement of a microcantilever based mass sensor

DOI Web Site Web Site 1 Citations

Journal

Microelectronic Engineering

Microelectronic Engineering 86 (4-6), 1187-1189, 2009-04

Elsevier BV

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Details 詳細情報について

CRID

1360013171674092544
DOI

10.1016/j.mee.2009.01.022
ISSN

01679317
Web Site

https://api.elsevier.com/content/article/PII:S016793170900046X?httpAccept=text/xml

https://api.elsevier.com/content/article/PII:S016793170900046X?httpAccept=text/plain
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