Single etch grating couplers for mass fabrication with DUV lithography

Details 詳細情報について

• CRID

  1360013172765018112

• DOI

  10.1007/s11082-012-9563-2

• ISSN

  1572817X

  03068919

• Web Site

  http://link.springer.com/content/pdf/10.1007/s11082-012-9563-2.pdf

  http://link.springer.com/article/10.1007/s11082-012-9563-2/fulltext.html

  http://link.springer.com/content/pdf/10.1007/s11082-012-9563-2

• Data Source

  • Crossref