Chemisorbed hydrogen on <i>a</i>-carbon films

DOI PDF 被引用文献3件
  • A. R. Nyaiesh
    School of Engineering and Applied Sciences, University of Sussex, Brighton, BN1 9QT, United Kingdom
  • W. B. Nowak
    Department of Mechanical Engineering, Northeastern University, Boston, Massachusetts 02115

書誌事項

公開日
1983-04-01
DOI
  • 10.1116/1.572120
公開者
American Vacuum Society

この論文をさがす

説明

<jats:p>Hard, relatively transparent, amorphous carbon films have potential applications as wear-resistant coatings, including those in the optical industry. We have investigated some of the effects of elevated temperature on these films, deposited by glow discharge from methane. Differential scanning calorimetry (DSC) has shown a broad, asymmetric, exothermic peak at about 550 °C and a larger energy release at about 750 °C. The latter corresponds to a structural transformation (graphitization) and the sample becomes soft and black. The former appears to correspond to the release of hydrogen, similar to Si:H films. An analysis shows that the energy released, as measured in the DSC, is consistent with literature values for the energy of chemisorbed H on carbon and for the amount of ‘‘unbonded’’ H observed from a-carbon films. Models are presented for the film structures needed to account for this chemisorbed H and for the film densities and transmission electron microscope images.</jats:p>

収録刊行物

被引用文献 (3)*注記

もっと見る

詳細情報 詳細情報について

問題の指摘

ページトップへ