Anisotropically Etched Silicon Mirrors for Optical Sensor Applications

T. A. Kwa

Electronic Instrumentation Laboratory, Delft University of Technology, 2628 CD Delft, The Netherlands
P. J. French

Electronic Instrumentation Laboratory, Delft University of Technology, 2628 CD Delft, The Netherlands
R. F. Wolffenbuttel

Electronic Instrumentation Laboratory, Delft University of Technology, 2628 CD Delft, The Netherlands
P. M. Sarro

Electronic Instrumentation Laboratory, Delft University of Technology, 2628 CD Delft, The Netherlands
L. Hellemans

Electronic Instrumentation Laboratory, Delft University of Technology, 2628 CD Delft, The Netherlands
J. Snauwaert

Electronic Instrumentation Laboratory, Delft University of Technology, 2628 CD Delft, The Netherlands