Fabrication and Evaluation of an Uniform Piezoelectric Film for a Robot Skin Sensor

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In this paper, we propose a novel method to form a robot skin sensor by a piezoelectric material spraying technique. By spraying piezoelectric material, the robot skin sensor can be fabricated on a robot with 3D free form. Our fabrication method is based on the sol-gel spraying technique and we improve it for fabricating a larger and more uniform piezoelectric film with reproducibility. We conducted experiments to evaluate the film fabrication quality and the prototype sensor's characteristics. According to the results, the film fabricated by the proposed method has enough thickness uniformity on 100 [mm] square plane. Additionally, the prototype sensor responses well to the applied force and its sensitivity is 25 [mV/ N] with the bandwidth of 1 [kHz].

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