A piezoelectric micro-electro-mechanical system vector sensor with a mushroom-shaped proof mass for a dipole beam pattern

DOI Web Site Web Site 1 Citations

Journal

Sensors and Actuators A: Physical

Sensors and Actuators A: Physical 332 113129-, 2021-12

Elsevier BV

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Details 詳細情報について

CRID

1360017289334931840
DOI

10.1016/j.sna.2021.113129
ISSN

09244247
Web Site

https://api.elsevier.com/content/article/PII:S092442472100594X?httpAccept=text/xml

https://api.elsevier.com/content/article/PII:S092442472100594X?httpAccept=text/plain
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