Design, fabrication, and characterization of SU-8/carbon black nanocomposite based polymer MEMS acceleration sensor

Details 詳細情報について

• CRID

  1360017674735062272

• DOI

  10.1007/s00542-020-04824-7

• ISSN

  14321858

  09467076

• Web Site

  http://link.springer.com/content/pdf/10.1007/s00542-020-04824-7.pdf

  http://link.springer.com/article/10.1007/s00542-020-04824-7/fulltext.html

• Data Source

  • Crossref