書誌事項
- 公開日
- 2007-05
- DOI
-
- 10.1109/memstech.2007.4283429
- 公開者
- IEEE
収録刊行物
-
- 2007 International Conference on Perspective Technologies and Methods in MEMS Design
-
2007 International Conference on Perspective Technologies and Methods in MEMS Design 75-80, 2007-05
IEEE