Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry
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- E. Forsen
- Technical University of Denmark Department of Micro and Nanotechnology, , Kgs. Lyngby, DK-2800, Denmark
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- G. Abadal
- Universitat Autonoma de Barcelona Department of Electronic Engineering, , 08193 Bellaterra, Spain
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- S. Ghatnekar-Nilsson
- University of Lund Solid State Physics and The Nanometer Consortium, , 22362 Lund, Sweden
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- J. Teva
- Universitat Autonoma de Barcelona Department of Electronic Engineering, , 08193 Bellaterra, Spain
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- J. Verd
- Universitat Autonoma de Barcelona Department of Electronic Engineering, , 08193 Bellaterra, Spain
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- R. Sandberg
- Technical University of Denmark Department of Micro and Nanotechnology, , Kgs. Lyngby, DK-2800, Denmark
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- W. Svendsen
- Technical University of Denmark Department of Micro and Nanotechnology, , Kgs. Lyngby, DK-2800, Denmark
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- F. Perez-Murano
- Universitat Autonoma de Barcelona National Microelectronics Centre, , 08193 Bellaterra, Spain
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- J. Esteve
- Universitat Autonoma de Barcelona National Microelectronics Centre, , 08193 Bellaterra, Spain
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- E. Figueras
- Universitat Autonoma de Barcelona National Microelectronics Centre, , 08193 Bellaterra, Spain
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- F. Campabadal
- Universitat Autonoma de Barcelona National Microelectronics Centre, , 08193 Bellaterra, Spain
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- L. Montelius
- University of Lund Solid State Physics and The Nanometer Consortium, , 22362 Lund, Sweden
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- N. Barniol
- Universitat Autonoma de Barcelona Department of Electronic Engineering , 08193 Bellaterra, Spain
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- A. Boisen
- Technical University of Denmark Department of Micro and Nanotechnology, , Kgs. Lyngby, Dk-2800, Denmark
説明
<jats:p>Nanomechanical resonators have been monolithically integrated on preprocessed complementary metal-oxide-semiconductor (CMOS) chips. Fabricated resonator systems have been designed to have resonance frequencies up to 1.5 MHz. The systems have been characterized in ambient air and vacuum conditions and display ultrasensitive mass detection in air. A mass sensitivity of 4ag∕Hz has been determined in air by placing a single glycerine drop, having a measured weight of 57 fg, at the apex of a cantilever and subsequently measuring a frequency shift of 14.8 kHz. CMOS integration enables electrostatic excitation, capacitive detection, and amplification of the resonance signal directly on the chip.</jats:p>
収録刊行物
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- Applied Physics Letters
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Applied Physics Letters 87 (4), 043507-, 2005-07-21
AIP Publishing