Analysis of Cluster Growth in Magnetron-sputtering Metal-cluster Source by Optical Emission Spectroscopy

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  • Satoshi Kono
    Department of Chemistry, Faculty of Science, Kyushu University, 744 Motooka, Nishi-ku, Fukuoka 819-0395, Japan
  • Masashi Arakawa
    Department of Chemistry, Faculty of Science, Kyushu University, 744 Motooka, Nishi-ku, Fukuoka 819-0395, Japan
  • Akira Terasaki
    Department of Chemistry, Faculty of Science, Kyushu University, 744 Motooka, Nishi-ku, Fukuoka 819-0395, Japan

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We investigate cluster-growth processes in a magnetron-sputtering cluster source by employing silver as a target metal. An optical emission spectrum of discharge plasma is measured along with a mas...

Journal

  • Chemistry Letters

    Chemistry Letters 48 (12), 1537-1540, 2019-12-05

    Oxford University Press (OUP)

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