- 【Updated on May 12, 2025】 Integration of CiNii Dissertations and CiNii Books into CiNii Research
- Trial version of CiNii Research Knowledge Graph Search feature is available on CiNii Labs
- Suspension and deletion of data provided by Nikkei BP
- Regarding the recording of “Research Data” and “Evidence Data”
Analysis of Cluster Growth in Magnetron-sputtering Metal-cluster Source by Optical Emission Spectroscopy
-
- Satoshi Kono
- Department of Chemistry, Faculty of Science, Kyushu University, 744 Motooka, Nishi-ku, Fukuoka 819-0395, Japan
-
- Masashi Arakawa
- Department of Chemistry, Faculty of Science, Kyushu University, 744 Motooka, Nishi-ku, Fukuoka 819-0395, Japan
-
- Akira Terasaki
- Department of Chemistry, Faculty of Science, Kyushu University, 744 Motooka, Nishi-ku, Fukuoka 819-0395, Japan
Search this article
Description
We investigate cluster-growth processes in a magnetron-sputtering cluster source by employing silver as a target metal. An optical emission spectrum of discharge plasma is measured along with a mas...
Journal
-
- Chemistry Letters
-
Chemistry Letters 48 (12), 1537-1540, 2019-12-05
Oxford University Press (OUP)
- Tweet
Keywords
Details 詳細情報について
-
- CRID
- 1360283694082815872
-
- NII Article ID
- 130007757565
-
- ISSN
- 13480715
- 03667022
-
- Article Type
- journal article
-
- Data Source
-
- Crossref
- CiNii Articles
- KAKEN
- OpenAIRE