Submicron scale image observation with a grazing incidence reflection-type single-shot soft X-ray microscope
Description
A grazing incidence reflection-type soft X-ray microscope, using a Fresnel zone plate and a soft X-ray laser with wavelength 13.9 nm and pulse width 7 ps, was developed. Submicron size groove structures made on a Pt film were clearly captured at a single shot exposure, with spatial resolution of about 360 nm. A wide field view of 100 µm square was secured under the Kohler illumination. This microscope also had a large depth of focus of more than 100 µm and was proven to have a sufficient performance for observing surface morphological changes.
Journal
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 53 (8), 080302-, 2014-07-03
IOP Publishing
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Details 詳細情報について
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- CRID
- 1360284924866274176
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- NII Article ID
- 210000144288
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- ISSN
- 13474065
- 00214922
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- Data Source
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- Crossref
- CiNii Articles
- KAKEN
- OpenAIRE