Helicon high-density plasma sources: physics and applications
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- Shunjiro Shinohara
- Division of Advanced Mechanical Systems Engineering, Institute of Engineering, Tokyo University of Agriculture and Technology, Tokyo, Japan
書誌事項
- 公開日
- 2018-01
- 資源種別
- journal article
- DOI
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- 10.1080/23746149.2017.1420424
- 公開者
- Informa UK Limited
説明
Helicon high-density (up to ~1013 cm−3) plasma sources using a radio frequency wave in the presence of a magnetic field under a low pressure are very promising for various application fields owing to the flexibility of external operational parameters. In addition, these sources have interesting inherent characteristics. Herein, the basic features of helicon wave plasmas including production mechanisms are briefly described, focusing on some similarities to other fields. Examples of specific helicon sources are also introduced. Then, an extensive variety of applications ranging from fundamental to practical applications, which are very influential for further development in each field, are introduced, emphasizing crucial points.
収録刊行物
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- Advances in Physics: X
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Advances in Physics: X 3 (1), 1420424-, 2018-01
Informa UK Limited
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詳細情報 詳細情報について
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- CRID
- 1360285709293284480
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- ISSN
- 23746149
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- 資料種別
- journal article
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- データソース種別
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- Crossref
- KAKEN
- OpenAIRE
