Highly c-axis-oriented monocrystalline Pb(Zr, Ti)O<sub>3</sub> thin films on si wafer prepared by fast cooling immediately after sputter deposition
収録刊行物
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- IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
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IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 61 (9), 1552-1558, 2014-09
Institute of Electrical and Electronics Engineers (IEEE)