Compact full-field hard x-ray microscope based on advanced Kirkpatrick–Baez mirrors
説明
<jats:p>X-ray full-field microscopy is a promising method for nondestructive observation of opaque materials because it can attain a high resolution and wide field of view without sample scanning. We recently developed hard x-ray objective optics, which are key devices for full-field microscopy, based on total-reflection mirrors with high throughput and achromatic properties. The objective optics consist of two types of advanced Kirkpatrick–Baez mirrors configured as crossed one-dimensional Wolter type I and type III optics. The designed optics possessed magnification factors of 42–45 with a compact camera length of approximately 2 m. The hard x-ray full-field microscope based on this system was tested at the BL29XU beamline at SPring-8. We were able to resolve 100-nm periods (50-nm line widths) of a resolution test chart at a photon energy of 15 keV over 30 h, which demonstrated the remarkable stability of this system. The image quality was preserved over a wide photon energy range from 9 to 15 keV. A periodic dot pattern with dot diameters of 300 nm, formed on a 775-µm-thick Si substrate, was three-dimensionally visualized by computed tomography.</jats:p>
収録刊行物
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- Optica
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Optica 7 (4), 367-, 2020-04-20
Optica Publishing Group
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詳細情報 詳細情報について
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- CRID
- 1360290617726187520
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- ISSN
- 23342536
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- 資料種別
- journal article
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- データソース種別
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- Crossref
- KAKEN
- OpenAIRE