3D nanopore shape control by current-stimulus dielectric breakdown

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  • Cuifeng Ying
    Nankai University 1 Key Laboratory of Weak-Light Nonlinear Photonics, Ministry of Education, School of Physics, , Tianjin 300071, China
  • Yuechuan Zhang
    Chinese Academy of Sciences 2 Chongqing Key Laboratory of Multi-Scale Manufacturing Technology, Chongqing Institute of Green and Intelligent Technology, , Chongqing 400714, China
  • Yanxiao Feng
    Chinese Academy of Sciences 2 Chongqing Key Laboratory of Multi-Scale Manufacturing Technology, Chongqing Institute of Green and Intelligent Technology, , Chongqing 400714, China
  • Daming Zhou
    Chinese Academy of Sciences 2 Chongqing Key Laboratory of Multi-Scale Manufacturing Technology, Chongqing Institute of Green and Intelligent Technology, , Chongqing 400714, China
  • Deqiang Wang
    Nankai University 1 Key Laboratory of Weak-Light Nonlinear Photonics, Ministry of Education, School of Physics, , Tianjin 300071, China
  • Yinxiao Xiang
    Nankai University 1 Key Laboratory of Weak-Light Nonlinear Photonics, Ministry of Education, School of Physics, , Tianjin 300071, China
  • Wenyuan Zhou
    Nankai University 1 Key Laboratory of Weak-Light Nonlinear Photonics, Ministry of Education, School of Physics, , Tianjin 300071, China
  • Yongsheng Chen
    Nankai University 4 Key Laboratory of Functional Polymer Materials, Center for Nanoscale Science and Technology, Institute of Polymer Chemistry, College of Chemistry, , Tianjin 300071, China
  • Chunlei Du
    Chinese Academy of Sciences 2 Chongqing Key Laboratory of Multi-Scale Manufacturing Technology, Chongqing Institute of Green and Intelligent Technology, , Chongqing 400714, China
  • Jianguo Tian
    Nankai University 1 Key Laboratory of Weak-Light Nonlinear Photonics, Ministry of Education, School of Physics, , Tianjin 300071, China

Description

<jats:p>We propose a simple and cost-effect method, current-stimulus dielectric breakdown, to manipulate the 3D shapes of the nanochannels in 20-nm-thick SiNx membranes. Besides the precise control of nanopore size, the cone orientation can be determined by the pulse polarity. The cone angle of nanopores can be systematically tuned by simply changing the stimulus pulse waveform, allowing the gradual shape control from conical to obconical. After they are formed, the cone angle of these nanopores can be further tuned in a certain range by adjusting the widening pulse. Such size and 3D shape controllable abiotic nanopores can construct a constriction in the nanochannel and hence produce a sub-nm “sensing zone” to suit any desired bio-sensing or precise DNA sequencing. Using these conical nanopores, 20-nt ssDNA composed of homopolymers (poly(dA)20, poly(dC)20, and poly(dT)20) can be clearly differentiated by their ionic current signals.</jats:p>

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