Planeness Measurement of Computer Harddisk Surface Based on Opto-Mechatronics Technology

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<jats:p>This paper presents a novel method based on optomechatronics for highly accurately detecting the planeness of computer hard-disk surfaces. This article introduces the detailed design of the system, which includes four modules: the optic-electric detection module, the 2-dimensional mechanic platform, the motion control module and the human-machine interaction module. Results show that the system has merits like non-contact, high accuracy, flexible and reliable control and high efficiency. The system has been applied successfully at a foreign-funded enterprise in Singapore.</jats:p>

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