Fabrication of alloys and superlattices based on ZnO towards ultraviolet laser

書誌事項

公開日
1998-11
権利情報
  • https://www.elsevier.com/tdm/userlicense/1.0/
DOI
  • 10.1016/s0921-5107(98)00218-9
公開者
Elsevier BV

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説明

Abstract We have grown epitaxial Mg x Zn 1− x O alloy films and ZnO/Mg x Zn 1− x O ( x =0.20) superlattices on sapphire(0001) substrates by laser molecular beam epitaxy and characterized their structures by X-ray diffraction. Single phase Mg x Zn 1− x O could be obtained up to x =0.33, whereas MgO impurity phase with (111) orientation segregated at x >0.33. The bandgap of Mg x Zn 1− x O was successfully controlled as verified by the photoluminescence peaks shifting 3.36 eV ( x =0) to 3.87 eV ( x =0.33). It was found that the structure of the superlattices was greatly improved by the use of a ZnO buffer layer on sapphire substrate prior to the deposition of superlattice. Small angle X-ray diffraction peaks corresponding to the period of the superlattices ranging from 8 to 18 nm could be clearly observed.

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