Model-based white light interference microscopy for metrology of transparent film stacks and optically-unresolved structures

詳細情報 詳細情報について

• CRID

  1360299151468065920

• DOI

  10.1007/978-3-642-03051-2_40

• Web Site

  https://link.springer.com/content/pdf/10.1007/978-3-642-03051-2_40

• データソース種別

  • Crossref