First Demonstration of GAA Monolayer-MoS<sub>2</sub> Nanosheet nFET with 410μA μ m ID 1V VD at 40nm gate length
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- Yun-Yan Chung
- Taiwan Semiconductor Manufacturing Company,Corporate Research,Hsinchu,Taiwan
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- Bo-Jhih Chou
- Institute of Electronics, National Yang Ming Chiao Tung University,Hsinchu,Taiwan
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- Chen-Feng Hsu
- Taiwan Semiconductor Manufacturing Company,Corporate Research,Hsinchu,Taiwan
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- Wei-Sheng Yun
- Taiwan Semiconductor Manufacturing Company,Corporate Research,Hsinchu,Taiwan
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- Ming-Yang Li
- Taiwan Semiconductor Manufacturing Company,Corporate Research,Hsinchu,Taiwan
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- Sheng-Kai Su
- Taiwan Semiconductor Manufacturing Company,Corporate Research,Hsinchu,Taiwan
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- Yu-Tsung Liao
- Institute of Electronics, National Yang Ming Chiao Tung University,Hsinchu,Taiwan
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- Meng-Chien Lee
- Institute of Electronics, National Yang Ming Chiao Tung University,Hsinchu,Taiwan
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- Guo-Wei Huang
- Taiwan Semiconductor Manufacturing Company,Failure Analysis Division,Hsinchu,Taiwan
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- San-Lin Liew
- Taiwan Semiconductor Manufacturing Company,Failure Analysis Division,Hsinchu,Taiwan
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- Yun-Yang Shen
- National Yang Ming Chiao Tung University,Department of Electrophysics,Hsinchu,Taiwan
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- Wen-Hao Chang
- National Yang Ming Chiao Tung University,Department of Electrophysics,Hsinchu,Taiwan
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- Chien-Wei Chen
- Taiwan Instrument Research Institute,National Applied Research Laboratories,Hsinchu,Taiwan
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- Chi-Chung Kei
- Taiwan Instrument Research Institute,National Applied Research Laboratories,Hsinchu,Taiwan
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- Han Wang
- Taiwan Semiconductor Manufacturing Company,Corporate Research,San Jose,USA
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- H.-S. Philip Wong
- Taiwan Semiconductor Manufacturing Company,Corporate Research,Hsinchu,Taiwan
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- T. Y. Lee
- Taiwan Semiconductor Manufacturing Company,Corporate Research,Hsinchu,Taiwan
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- Chao-Hsin Chien
- Institute of Electronics, National Yang Ming Chiao Tung University,Hsinchu,Taiwan
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- Chao-Ching Cheng
- Taiwan Semiconductor Manufacturing Company,Corporate Research,Hsinchu,Taiwan
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- Iuliana P. Radu
- Taiwan Semiconductor Manufacturing Company,Corporate Research,Hsinchu,Taiwan
収録刊行物
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- 2022 International Electron Devices Meeting (IEDM)
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2022 International Electron Devices Meeting (IEDM) 34.5.1-34.5.4, 2022-12-03
IEEE