First Demonstration of GAA Monolayer-MoS<sub>2</sub> Nanosheet nFET with 410μA μ m ID 1V VD at 40nm gate length

  • Yun-Yan Chung
    Taiwan Semiconductor Manufacturing Company,Corporate Research,Hsinchu,Taiwan
  • Bo-Jhih Chou
    Institute of Electronics, National Yang Ming Chiao Tung University,Hsinchu,Taiwan
  • Chen-Feng Hsu
    Taiwan Semiconductor Manufacturing Company,Corporate Research,Hsinchu,Taiwan
  • Wei-Sheng Yun
    Taiwan Semiconductor Manufacturing Company,Corporate Research,Hsinchu,Taiwan
  • Ming-Yang Li
    Taiwan Semiconductor Manufacturing Company,Corporate Research,Hsinchu,Taiwan
  • Sheng-Kai Su
    Taiwan Semiconductor Manufacturing Company,Corporate Research,Hsinchu,Taiwan
  • Yu-Tsung Liao
    Institute of Electronics, National Yang Ming Chiao Tung University,Hsinchu,Taiwan
  • Meng-Chien Lee
    Institute of Electronics, National Yang Ming Chiao Tung University,Hsinchu,Taiwan
  • Guo-Wei Huang
    Taiwan Semiconductor Manufacturing Company,Failure Analysis Division,Hsinchu,Taiwan
  • San-Lin Liew
    Taiwan Semiconductor Manufacturing Company,Failure Analysis Division,Hsinchu,Taiwan
  • Yun-Yang Shen
    National Yang Ming Chiao Tung University,Department of Electrophysics,Hsinchu,Taiwan
  • Wen-Hao Chang
    National Yang Ming Chiao Tung University,Department of Electrophysics,Hsinchu,Taiwan
  • Chien-Wei Chen
    Taiwan Instrument Research Institute,National Applied Research Laboratories,Hsinchu,Taiwan
  • Chi-Chung Kei
    Taiwan Instrument Research Institute,National Applied Research Laboratories,Hsinchu,Taiwan
  • Han Wang
    Taiwan Semiconductor Manufacturing Company,Corporate Research,San Jose,USA
  • H.-S. Philip Wong
    Taiwan Semiconductor Manufacturing Company,Corporate Research,Hsinchu,Taiwan
  • T. Y. Lee
    Taiwan Semiconductor Manufacturing Company,Corporate Research,Hsinchu,Taiwan
  • Chao-Hsin Chien
    Institute of Electronics, National Yang Ming Chiao Tung University,Hsinchu,Taiwan
  • Chao-Ching Cheng
    Taiwan Semiconductor Manufacturing Company,Corporate Research,Hsinchu,Taiwan
  • Iuliana P. Radu
    Taiwan Semiconductor Manufacturing Company,Corporate Research,Hsinchu,Taiwan

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