Measurement of Magnesium Oxide Sputtering Yields by He and Ar Ions with a Low-Energy Mass-Selected Ion Beam System

Details 詳細情報について

• CRID

  1360566396806930816

• NII Article ID

  210000063805

• DOI

  10.1143/jjap.46.l1132

• ISSN

  13474065

  00214922

• Web Site

  https://iopscience.iop.org/article/10.1143/JJAP.46.L1132

  https://iopscience.iop.org/article/10.1143/JJAP.46.L1132/pdf

• Data Source

  • Crossref
  • CiNii Articles