Comparative Study of Acoustic Wave Devices Using Thin Piezoelectric Plates in the 3–5-GHz Range
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説明
This paper investigates the applicability of acoustic wave devices using an interdigital transducer placed on a thin piezoelectric crystal plate to the 3–5-GHz range, where significant performance degradation was expected in surface acoustic wave (SAW) devices. Three types of the SAW-like devices were fabricated by using a KrF stepper/scanner, and their performances are compared from various aspects: 1) a 3.5-GHz resonator using a rotated $Y$ -cut LiTaO3 plate attached on a Si substrate; 2) a 5-GHz resonator using a $X$ -cut LiNbO3 plate on a Si substrate; and 3) a 5.4-GHz $A_{1}$ Lamb mode resonator on a free-standing $Z$ -cut LiNbO3 plate. It is revealed that these devices offer excellent performances even in the 3–5-GHz range.
収録刊行物
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- IEEE Transactions on Microwave Theory and Techniques
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IEEE Transactions on Microwave Theory and Techniques 67 (3), 915-921, 2019-03
Institute of Electrical and Electronics Engineers (IEEE)
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詳細情報 詳細情報について
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- CRID
- 1360567185369048448
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- ISSN
- 15579670
- 00189480
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- 資料種別
- journal article
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- データソース種別
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- Crossref
- KAKEN
- OpenAIRE