Formation of various-axis-oriented wurtzite nuclei and enlargement of the <i>a</i>-axis-oriented region in AlFeN films deposited on Si(100) substrates
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- Saki Imada
- Faculty of Electrical Engineering and Electronics
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- Toshiyuki Isshiki
- Faculty of Electrical Engineering and Electronics
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- Nobuyuki Tatemizo
- Faculty of Electrical Engineering and Electronics
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- Koji Nishio
- Faculty of Electrical Engineering and Electronics
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- Shuichi Mamishin
- Hitachi High-Tech Corporation
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- Yuya Suzuki
- Hitachi High-Tech Corporation
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- Katsuji Ito
- Hitachi High-Tech Corporation
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- Kiyofumi Nitta
- Japan Synchrotron Radiation Research Institute
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- Hiroki Suga
- Japan Synchrotron Radiation Research Institute
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- Oki Sekizawa
- Japan Synchrotron Radiation Research Institute
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- Yusuke Tamenori
- Japan Synchrotron Radiation Research Institute
説明
<p> <italic>A</italic>-axis-oriented single-crystal AlFeN grains grew from randomly oriented small wurtzite grains with deposition time on Si(100). (a) Deposition time dependence of Al K-edge XANES spectra. (b) Theoretical spectra.</p>
収録刊行物
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- Materials Advances
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Materials Advances 2 (12), 4075-4080, 2021
Royal Society of Chemistry (RSC)