Specific heat and thermal conductivity of low-stress amorphous Si–N membranes

詳細情報 詳細情報について

• CRID

  1360574093809214208

• DOI

  10.1016/j.ssc.2003.08.048

• ISSN

  00381098

• Web Site

  https://api.elsevier.com/content/article/PII:S0038109803008391?httpAccept=text/xml

  https://api.elsevier.com/content/article/PII:S0038109803008391?httpAccept=text/plain

• データソース種別

  • Crossref