Fastest Thickness Measurements with a Terahertz Time-Domain System Based on Electronically Controlled Optical Sampling
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- Milad Yahyapour
- TOPTICA Photonics AG, Lochhamer Schlag 19, 82166 Gräfelfing, Germany
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- Angelika Jahn
- TOPTICA Photonics AG, Lochhamer Schlag 19, 82166 Gräfelfing, Germany
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- Katja Dutzi
- TOPTICA Photonics AG, Lochhamer Schlag 19, 82166 Gräfelfing, Germany
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- Thomas Puppe
- TOPTICA Photonics AG, Lochhamer Schlag 19, 82166 Gräfelfing, Germany
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- Patrick Leisching
- TOPTICA Photonics AG, Lochhamer Schlag 19, 82166 Gräfelfing, Germany
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- Bernhard Schmauss
- Friedrich-Alexander University Erlangen Nürnberg, 91058 Erlangen, Germany
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- Nico Vieweg
- TOPTICA Photonics AG, Lochhamer Schlag 19, 82166 Gräfelfing, Germany
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- Anselm Deninger
- TOPTICA Photonics AG, Lochhamer Schlag 19, 82166 Gräfelfing, Germany
説明
<jats:p>We apply a fast terahertz time-domain spectroscopy (TDS) system based on electronically controlled optical sampling (ECOPS) to contact-free thickness gauging. Our setup achieves a measurement speed of 1600 terahertz pulse traces per second, which—to our knowledge—represents the fastest thickness measurement performed with any terahertz system to-date. Using a silicon wafer as a test sample, we compare data of the ECOPS experiment to results obtained with a conventional terahertz TDS system and a mechanical micrometer gauge. We show that all systems provide consistent results within the measurement accuracy. Moreover, we perform thickness measurements of a rapidly moving sample and characterize the ECOPS setup with respect to time-domain dynamic range, signal-to-noise ratio, and spectral properties.</jats:p>
収録刊行物
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- Applied Sciences
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Applied Sciences 9 (7), 1283-, 2019-03-27
MDPI AG