The Preparation and Properties of Thin Film Silicon-Nitrogen Compounds Produced by a Radio Frequency Glow Discharge Reaction
書誌事項
- 公開日
- 1967
- DOI
-
- 10.1149/1.2426714
- 公開者
- The Electrochemical Society
この論文をさがす
収録刊行物
-
- Journal of The Electrochemical Society
-
Journal of The Electrochemical Society 114 (7), 713-, 1967
The Electrochemical Society