1.05-GHz CMOS oscillator based on lateral- field-excited piezoelectric AlN contour- mode MEMS resonators
収録刊行物
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- IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
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IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 57 (1), 82-87, 2010-01
Institute of Electrical and Electronics Engineers (IEEE)
