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Grain Enlargement of Ultrathin Si Films on Insulators by Sn-Doping
Journal
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- Extended Abstracts of the 2023 International Conference on Solid State Devices and Materials
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Extended Abstracts of the 2023 International Conference on Solid State Devices and Materials 2023-09-07
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1360584340535166976
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- Article Type
- journal article
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- Data Source
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- Crossref
- KAKEN
