Production rates and destruction frequencies of ammonia in inductively coupled <scp>H<sub>2</sub>O</scp>/<scp>N<sub>2</sub></scp> and <scp>H<sub>2</sub></scp>/<scp>N<sub>2</sub></scp> plasmas

  • Jin Takahashi
    Division of Applied Quantum Science and Engineering Hokkaido University Sapporo Japan
  • Koichi Sasaki
    Division of Applied Quantum Science and Engineering Hokkaido University Sapporo Japan

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<jats:title>Abstract</jats:title><jats:p>We compared the production rates and the destruction frequencies of ammonia in inductively coupled H<jats:sub>2</jats:sub>O/N<jats:sub>2</jats:sub> and H<jats:sub>2</jats:sub>/N<jats:sub>2</jats:sub> plasmas. We observed that the production rates of ammonia ranged between 4 and 7 μmol/s both in the H<jats:sub>2</jats:sub>O/N<jats:sub>2</jats:sub> and H<jats:sub>2</jats:sub>/N<jats:sub>2</jats:sub> plasmas generated at rf powers between 100 and 160 W, corresponding to the energy cost of 23–25 mol/MJ. Almost the same production rates suggest the usefulness of H<jats:sub>2</jats:sub>O as the resource for hydrogenation of atomic nitrogen adsorbed on surfaces. On the other hand, the destruction frequency was 2–4 times higher in the H<jats:sub>2</jats:sub>O/N<jats:sub>2</jats:sub> than H<jats:sub>2</jats:sub>/N<jats:sub>2</jats:sub> plasmas. Although the H<jats:sub>2</jats:sub>O/N<jats:sub>2</jats:sub> plasma has a drawback in the destruction frequency, the present work shows its potential for the direct synthesis of ammonia from water with skipping the production of hydrogen.</jats:p>

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