Numerical Simulations to Study Growth of Single-Crystal Diamond by Using Microwave Plasma Chemical Vapor Deposition with Reactive (H, C, N) Species

DOI 5 Citations 50 References

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Details 詳細情報について

  • CRID
    1360847874816016384
  • NII Article ID
    210000141149
  • DOI
    10.7567/jjap.51.090105
  • ISSN
    13474065
    00214922
  • Data Source
    • Crossref
    • CiNii Articles

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