X-ray absorption and X-ray photoelectron spectroscopic studies of air-oxidized chromium nitride thin films
書誌事項
- 公開日
- 1996-08
- 権利情報
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- https://www.elsevier.com/tdm/userlicense/1.0/
- DOI
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- 10.1016/s0040-6090(96)88640-8
- 公開者
- Elsevier BV
この論文をさがす
説明
Abstract The surface oxidation of CrN thin films prepared by the cathode are ion plating method was studied by X-ray absorption spectroscopy (XAS) and X-ray photoelectron spectroscopy (XPS) using soft X-rays from synchrotron radiation. The results indicate that molecular nitrogen is formed in the interstitial position of the chromium oxide matrix at the initial stage of oxidation. On further oxidation, at a higher temperature, molecular nitrogen is gradually released from the surface, with part of the displaced nitrogen remaining in the interstitial position.
収録刊行物
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- Thin Solid Films
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Thin Solid Films 281-282 314-317, 1996-08
Elsevier BV