Dynamic Analysis of Multi-Beam MEMS Structures for the Extraction of the Stress-Strain Response of Thin Films

詳細情報 詳細情報について

• CRID

  1360855570110340992

• DOI

  10.1007/s11340-012-9654-9

• ISSN

  17412765

  00144851

• Web Site

  http://link.springer.com/content/pdf/10.1007/s11340-012-9654-9.pdf

  http://link.springer.com/article/10.1007/s11340-012-9654-9/fulltext.html

  http://link.springer.com/content/pdf/10.1007/s11340-012-9654-9

• データソース種別

  • Crossref