Change in refractive index and in chemical state of electron beam irradiated fluorinated polyimide films
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- Yasuko Yamada Maruo
- NTT Interdisciplinary Research Laboratories, Musashino-shi, Tokyo 180, Japan
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- Shigekuni Sasaki
- NTT Interdisciplinary Research Laboratories, Musashino-shi, Tokyo 180, Japan
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- Toshiaki Tamamura
- NTT Opto-electronics Laboratories, Atsugi-shi, Kanagawa 243-01, Japan
抄録
<jats:p>The refractive index of fluorinated polyimide is increased by electron beam irradiation. The degree of refractive index change can be controlled by adjusting the dose of the electron beam. The depth of the refractive index change depends on the energy of the beam. X-ray photoelectron spectroscopy (XPS), secondary ion mass spectroscopy (SIMS), and surface profile measurement of electron beam irradiated fluorinated polyimide film were carried out to investigate the causes of the refractive index increase. The surface profile measurement indicated that the polyimide volume was decreased by an electron beam irradiation. The XPS and SIMS showed that electron beam irradiation decreases the fluorine content. The main cause of the refractive index increase is thought to be this decrease in fluorine content and volume.</jats:p>
収録刊行物
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- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 13 (6), 2758-2763, 1995-11-01
American Vacuum Society
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詳細情報 詳細情報について
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- CRID
- 1360855570187602560
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- NII論文ID
- 30020298562
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- DOI
- 10.1116/1.579701
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- ISSN
- 15208559
- 07342101
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- データソース種別
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- Crossref
- CiNii Articles