Impact of Lateral SnO<sub>2</sub> Nanofilm Channel Geometry on a 1024 Crossbar Chemical Sensor Array

DOI Web Site 参考文献58件
  • Haruka Honda
    Department of Applied Chemistry, Graduate School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo, Tokyo 113-8656, Japan
  • Tsunaki Takahashi
    Department of Applied Chemistry, Graduate School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo, Tokyo 113-8656, Japan
  • Yohsuke Shiiki
    Department of Electronics and Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Kohoku, Yokohama, Kanagawa 223-8522, Japan
  • Hao Zeng
    Department of Applied Chemistry, Graduate School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo, Tokyo 113-8656, Japan
  • Kentaro Nakamura
    Department of Applied Chemistry, Graduate School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo, Tokyo 113-8656, Japan
  • Shintaro Nagata
    Department of Applied Chemistry, Graduate School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo, Tokyo 113-8656, Japan
  • Takuro Hosomi
    Department of Applied Chemistry, Graduate School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo, Tokyo 113-8656, Japan
  • Wataru Tanaka
    Department of Applied Chemistry, Graduate School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo, Tokyo 113-8656, Japan
  • Guozhu Zhang
    Department of Applied Chemistry, Graduate School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo, Tokyo 113-8656, Japan
  • Masaki Kanai
    Institute for Materials Chemistry and Engineering, Kyushu University, 6-1 Kasuga-Koen, Kasuga, Fukuoka 816-8580, Japan
  • Kazuki Nagashima
    Department of Applied Chemistry, Graduate School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo, Tokyo 113-8656, Japan
  • Hiroki Ishikuro
    Department of Electronics and Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Kohoku, Yokohama, Kanagawa 223-8522, Japan
  • Takeshi Yanagida
    Department of Applied Chemistry, Graduate School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo, Tokyo 113-8656, Japan

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説明

We propose a rational strategy to fabricate thermally robust, highly integrated molecular and gas sensors utilizing a lateral SnO 2 nanofilm channel geometry on a 1024 crossbar sensor array. The proposed lateral channel geometry substantially suppresses the detrimental effects of parasitic interconnect wire resistances compared with those of a conventional vertical sandwich-type crossbar array because of its excellent resistance controllability. A conductive oxide top-contact electrode on the lateral SnO 2 nanofilm channel enhances the thermal stability at temperatures of up to 500 °C in ambient air. Integrating this lateral SnO 2 nanofilm geometry with analog circuits enables the operation of a 1024 crossbar sensor array without selector devices to avoid sneak currents. The developed 1024 crossbar sensor array system detects the local spatial distribution of the molecular gas concentration. The spatial data of molecular concentrations include molecule-specific data to distinguish various volatile molecules based on their vapor pressures. Thus, this integrated crossbar sensor array system using lateral nanofilm geometry offers a platform for robust, reliable, highly integrated molecular and gas sensors.

収録刊行物

  • ACS Sensors

    ACS Sensors 7 (2), 460-468, 2022-01-23

    American Chemical Society (ACS)

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