Silicon nanowire sensor for gas detection fabricated by nanoimprint on SU8/SiO2/PMMA trilayer
書誌事項
- 公開日
- 2009-04
- 権利情報
-
- https://www.elsevier.com/tdm/userlicense/1.0/
- https://www.elsevier.com/legal/tdmrep-license
- https://doi.org/10.15223/policy-017
- https://doi.org/10.15223/policy-037
- https://doi.org/10.15223/policy-012
- https://doi.org/10.15223/policy-029
- https://doi.org/10.15223/policy-004
- DOI
-
- 10.1016/j.mee.2008.12.022
- 公開者
- Elsevier BV
この論文をさがす
収録刊行物
-
- Microelectronic Engineering
-
Microelectronic Engineering 86 (4-6), 1238-1242, 2009-04
Elsevier BV