Properties of a four-electrode adjustable electron mirror as an aberration corrector
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- Zhifeng Shao
- Department of Physiology, University of Virginia, Box 449, Charlottesville, Virginia 22908
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- Xiao Dong Wu
- Edward L. Ginzton Laboratory, Department of Electrical Engineering, Stanford University, Stanford, California 94305-4085
書誌事項
- 公開日
- 1990-04-01
- DOI
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- 10.1063/1.1141216
- 公開者
- AIP Publishing
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説明
<jats:p>A numerical analysis of a four-electrode electron mirror is presented. It is shown that this system can have adjustable aberration coefficients, opposite to the aberrations of conventional electron optical systems. Therefore, it is possible to use such an electron mirror as an aberration corrector to further improve resolutions in electron microscopes.</jats:p>
収録刊行物
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- Review of Scientific Instruments
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Review of Scientific Instruments 61 (4), 1230-1235, 1990-04-01
AIP Publishing