Fabrication of soft x-ray monolithic Wolter mirror based on surface scanning measurement using touch probe
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- Takehiro Kume
- Technology Center, Natsume Optical Corporation 1 , 1200-29 Kawaji, Iida, Nagano 399-2431, Japan
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- Kentaro Hiraguri
- Technology Center, Natsume Optical Corporation 1 , 1200-29 Kawaji, Iida, Nagano 399-2431, Japan
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- Yoichi Imamura
- Technology Center, Natsume Optical Corporation 1 , 1200-29 Kawaji, Iida, Nagano 399-2431, Japan
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- Yusuke Matsuzawa
- Technology Center, Natsume Optical Corporation 1 , 1200-29 Kawaji, Iida, Nagano 399-2431, Japan
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- Takahiro Saito
- Technology Center, Natsume Optical Corporation 1 , 1200-29 Kawaji, Iida, Nagano 399-2431, Japan
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- Hiroaki Miyashita
- Technology Center, Natsume Optical Corporation 1 , 1200-29 Kawaji, Iida, Nagano 399-2431, Japan
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- Yoko Takeo
- The Institute for Solid State Physics, The University of Tokyo 2 , 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8581, Japan
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- Yasunori Senba
- Japan Synchrotron Radiation Research Institute (JASRI) 3 , 1-1-1 Koto, Sayo-cho, Sayo-gun, Hyogo 679-5198, Japan
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- Hikaru Kishimoto
- Japan Synchrotron Radiation Research Institute (JASRI) 3 , 1-1-1 Koto, Sayo-cho, Sayo-gun, Hyogo 679-5198, Japan
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- Haruhiko Ohashi
- Japan Synchrotron Radiation Research Institute (JASRI) 3 , 1-1-1 Koto, Sayo-cho, Sayo-gun, Hyogo 679-5198, Japan
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- Hirokazu Hashizume
- Technology Center, Natsume Optical Corporation 1 , 1200-29 Kawaji, Iida, Nagano 399-2431, Japan
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- Hidekazu Mimura
- Department of Precision Engineering, Graduate School of Engineering, The University of Tokyo 4 , 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan
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説明
<jats:p>The monolithic Wolter mirror is an ideal optical device for focusing soft x rays to a submicron-sized spot, with the advantages of high efficiency, large acceptance, achromaticity, and robustness to alignment error. The fabrication process for this type of mirror has not been established because of the difficulty in highly accurate figure measurement of free-form surfaces with small radii of curvature and steep profiles. In this study, we employed tactile scanning measurement for surface characterization to fabricate a high-precision Wolter mirror. First, it was demonstrated that the touch probe measurement did not leave scratches on the raw surface of the mirror substrate. Next, the measurement capability of the surface profiler was assessed, and the data analysis conditions were determined. Finally, the Wolter mirror was fabricated through repeated figure correction based on the tactile measurement, and the figure error of the final surface was evaluated. Wave-optical simulations that used this error as reference suggested that the size of the beam focused by the mirror was equivalent to the theoretical value at 1000 eV. The reflected image with uniform intensity distribution obtained at SPring-8 also revealed the effectiveness of the present fabrication approach based on tactile measurement.</jats:p>
収録刊行物
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- Review of Scientific Instruments
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Review of Scientific Instruments 93 (6), 063101-, 2022-06-01
AIP Publishing
